The 10th Meeting for Advanced Electron Beam Lithography (MAEBL)

ABOUT

The 10th Meeting for Advanced Electron Beam Lithography (MAEBL - www.maebl.org) reconvenes the international electron beam lithography community. MAEBL fosters engagement virtually and in person spanning multiple time zones. Our friends at CITRIS and the University of California, Berkeley Marvell Nanofabrication Laboratory will host this year's main in-person meeting in Berkeley, California, USA. Bonus MAEBLx meetings will also be held online before the main event.

MAEBL 2026 Program-At-A-Glance

• MAEBLx Vendor Applications: TBD
• MAEBLx Australia: TBD
• MAEBL 10 Host Tour and Operations: Tuesday, October 13, 2026
• MAEBL 10 Foundations Workshop: Wednesday, October 14, 2026
• MAEBL 10 Core Meeting: Thursday, October 15, 2026

Program Highlights:

• View last year's MAEBL 2025 Program
• Full Registration ($190) provides full access to MAEBL 10 and the bonus MAEBLx meetings scheduled in their respective time zones.
• Student Registration ($55) has been created to encourage growth in student participation online or in person.
• Exclusive access to the MAEBL GatherTown space, SLACK channels, and invited speakers.
• Open discussions in our Common Challenges segment, to pose live questions to the MAEBL community, comprised of a serious group of EBL experts who love to share their knowledge.
• No nonsense EBL shop talk. More application than theory for the EBL practitioner.

Topics of discussion include, but are not limited to:

• Proximity Effect Correction
• Resist Characterization
• Scripting and Automation
• Pattern Fidelity Enhancement
• Throughput Enhancement
• Pattern Transfer (Etch and/or Lift-off)
• Anti-charging
• Field Stitching
• Beam Drift
• Image Processing
• Data Preparation
• Simulation
• Device Fabrication

REGISTRATION and QUALIFICATIONS TO REGISTER

Registration helps to offset the operational costs of the meeting series. A single registration is not for an organization but for an individual and is not transferrable.

All active EBL users and tool owners from academic, industry, or government institutions are encouraged to attend. To promote intimate dialogue, we have kindly requested that EBL hardware vendors refrain from registering. Attendance is granted to organizers, speakers, and non-EBL-hardware vendor sponsors. Advance online sign-up is required to participate as there will be no on-site registration. Thank you for your cooperation and understanding.

Again, a single registration is for an individual (not an organization) and is not transferable. Please be mindful that we are a non-profit organization operated by volunteers. Anyone wishing to attend must register under their own name. An attempt to transfer registration undermines our mission and capacity to organize meetings for the electron beam lithography community.

PRIVACY POLICY

In case of contact tracing, room block fulfillment, or any operations related to the safety and well-being of our attendees, your contact information may be shared with responsible entities. Since this is a networking event, your name and email will be shared with other attendees. As part of our sponsorship program, your name and email will be shared with our sponsoring vendors. For all other purposes, your registration information will not be distributed without your consent.

REFUND POLICY

No refunds will be issued. Please be mindful that we are a volunteer-operated non-profit organization. A single registration is for an individual, not an organization, and is not transferable. Anyone wishing to attend must register under their own name. An attempt to transfer registration undermines our mission and capacity to organize meetings for the electron beam lithography community.

ATTENDING IN PERSON

The health and safety of the MAEBL community are our primary concern. All in-person attendees must abide by the host's policies for on-campus engagement. All in-person attendees can, at their option, wear a face-covering. If contact tracing should occur, your information may be shared with the MAEBL Board, host, or any other responsible entities.

Know what’s Happening Next — before everyone else does.

Get App

Host or Publisher MAEBL, Inc.